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Rodenstock x20 532nm wafer inspection telescope

 
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Lou Jost



Joined: 04 Sep 2015
Posts: 2889
Location: Ecuador

PostPosted: Sun Jul 01, 2018 2:51 pm    Post subject: Rodenstock x20 532nm wafer inspection telescope Reply with quote

I bought this strange device and can't find a use for it. It is a Rodenstock 20x telescope for inspecting silicon wafers. It is labeled for 532nm green light. The seller wrote that it was "Removed from an AMAT ComplusMP inspection tool, model year 2002." It is very heavy and it appears to be a precision instrument.

An odd thing about it is the aperture, which is shaped like a coin slot. This is non-removable (as far as I can tell) and non-adjustable (except for orientation). Perhaps the lens uses a step-and scan process as described here:
http://nptel.ac.in/courses/103106075/Courses/2_8.html





I'll sell it for the price I paid, $220, plus shipping. It is in the US.
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