If you have a few minutes, this is a really good report on EUV tech from ASML. Best I've seen on the subject.
Short link:
https://archive.ph/TchSb
Long link:
http://archive.today/2021.11.01-024912/ ... ter-chips/
Also this is a nice whiteboard session video from ASML on Bragg mirrors used in EUV (glass and a normal mirror will absorb EUV):
https://www.youtube.com/watch?v=uEQp_mDIxw0
Best,
Robert
ASML EUV Technology Article Link
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