for a little while I was having problems with my 63x objective - there were shadows in the image. My observations were as follows:
1) Images with the 40x/1.30 are without problems
2) Images with the 63x/1.40 have shadows
3) All lenses and DIC prisms are clean
To identify the lens that gives problems you need to turn lenses/optical components. When you turn the right lens, the dust turns as well. But to follow this procedure I needed to see the dust better than just some shadows!
Here is a little trick that I got from a friendly Zeiss technician that I hope you will find helpful as well.

You can see the shadows left of the middle. Now I lowered the condensor to reduce the NA.


Lowering the condensor makes the dust appear!
Now it was fairly easy to identify the lens that has dust - it was the camera adapter lens. 5 minutes later the shadows were passé!

I was not aware that reducing the NA of the condensor will enhance the contrast to show dust in the path of the image formation.
Why did the 63/1.40 show the shadows and not the 40x/1.30? This is because the condensor has an NA of 0.90 and the difference between the objective NA and the condenser NA is big. The same effect made the dust clearly visible when I lowered the condensor - increasing the difference between lens NA and condensor NA!
I hope you will find this trick helpful - just in case

Regards
Ecki