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1999 AMI Wafer
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Smokedaddy



Joined: 07 Oct 2006
Posts: 1098
Location: Phoenix, Arizona

PostPosted: Mon Feb 26, 2018 12:58 pm    Post subject: Reply with quote

Just thought I'd slightly crop the one I previously posted.



-JW:
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Smokedaddy



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PostPosted: Tue Feb 27, 2018 3:11 pm    Post subject: Reply with quote

Thanks Rik, and thanks for helping.
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Smokedaddy



Joined: 07 Oct 2006
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PostPosted: Wed Feb 28, 2018 10:27 am    Post subject: Reply with quote

rjlittlefield wrote:
Adding some technical information about the stereo...
--Rik


Rik,

Is the stereo grey scale image a somewhat accurate representation of the different layered mask? If I'm deciphering the stereo correctly it looks like maybe 6 layers.

-JW:
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rjlittlefield
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Joined: 01 Aug 2006
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PostPosted: Wed Feb 28, 2018 12:19 pm    Post subject: Reply with quote

Smokedaddy wrote:
Is the stereo grey scale image a somewhat accurate representation of the different layered mask? If I'm deciphering the stereo correctly it looks like maybe 6 layers.

I'd say definitely yes, but if one of the chip guys has a different interpretation I would be very interested to hear. Remember that in these chips, conductors that cross and do not connect have to be in different levels.

By the way, sometimes it helps to "rock" the structure. Given a stereo pair, a simple way to do that is to pull the stereo pair into StereoPhoto Maker and rapidly click the "Swap Left/Right" button to repeatedly interchange the views. Depending on original layout, you may also need to use the left/right arrow keys to tweak up the alignment so that the structure appears to rock rather than shift as a unit left/right.

--Rik
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Smokedaddy



Joined: 07 Oct 2006
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PostPosted: Wed Feb 28, 2018 12:31 pm    Post subject: Reply with quote

Well to be honest, my original intent was to make a rocking image but it wasn't clear to me how to accomplish that. I wasn't sure if I was supposed to take the Zerene generated individual stereo images and import them into Photoshop to make a animated GIF in Photoshop.
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Smokedaddy



Joined: 07 Oct 2006
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PostPosted: Wed Feb 28, 2018 12:38 pm    Post subject: Reply with quote

I did try that in SM too. Looks like the furthest/deepest image shifts at the same time as the closest/nearest layer does, so only two images are involved?
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mawyatt



Joined: 22 Aug 2013
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PostPosted: Wed Feb 28, 2018 2:36 pm    Post subject: Reply with quote

James,

Sorry I missed the details!! Absolutely amazing images indeed

Seeing down 6 metal levels is probably beyond 3 microns in depth, but not sure what process this is in, nor the passivation used. Might be polyamide or BCB, judging from the color, but below this is usually SiN, or SiO2+SiN.

Please tell us how you did this incredible work Shocked

Best,

Mike
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rjlittlefield
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Joined: 01 Aug 2006
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PostPosted: Wed Feb 28, 2018 2:41 pm    Post subject: Reply with quote

Smokedaddy wrote:
Looks like the furthest/deepest image shifts at the same time as the closest/nearest layer does, so only two images are involved?

Yes, only two images. All the depth planes in the subject will shift at the same time, but by different amounts.

One plane can be selected to not shift, by carefully adjusting the left/right alignment (using the arrow keys, in StereoPhoto Maker).

If you want to count the number of different planes, you might adjust the alignment so that the front of the subject does not shift when you switch images, then gradually work your way to the back, counting how many different alignments you need, to make each depth in the subject not shift.

Quote:
supposed to take the Zerene generated individual stereo images and import them into Photoshop to make a animated GIF in Photoshop.

Yes, Photoshop or GIMP or ImageMagick or any of several others. Fairly soon now, I hope to have that functionality integrated into the ZS bundle, so users won't have to struggle with 3rd party software themselves.

--Rik
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rjlittlefield
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PostPosted: Wed Feb 28, 2018 2:49 pm    Post subject: Reply with quote

mawyatt wrote:
Seeing down 6 metal levels is probably beyond 3 microns in depth

As I understand the shooting process, 3 microns depth sounds almost certainly correct. JW monitors the position of his stage using a Mitutoyo dial indicator, one micron per tick mark. Those "1/3 um steps" listed in the image description were eyeballed between tick marks, so individual steps might be off a little, but the total ~3 microns, probably not.

The width number is less certain because that is calculated, not measured.

--Rik
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Smokedaddy



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PostPosted: Wed Feb 28, 2018 3:29 pm    Post subject: Reply with quote

I've actually spent quite a bit of time researching HOW (via DIY means) to measure the depth, either with ImageJ, open-source software but haven't found anything yet. Then again I'm totally out of my field. I suppose I should of stayed in school and followed my interest. Way to late now. <g>

http://etheses.whiterose.ac.uk/4686/1/PRINT%20ME_Thesis_%20DanieleDipresa.pdf

I gave this a shot for kicks but nothing useful to me.

https://imagej.nih.gov/ij/plugins/surface-plot-3d.html





-JW:


Last edited by Smokedaddy on Wed Feb 28, 2018 3:42 pm; edited 1 time in total
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Smokedaddy



Joined: 07 Oct 2006
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Location: Phoenix, Arizona

PostPosted: Wed Feb 28, 2018 3:38 pm    Post subject: Reply with quote

mawyatt wrote:
James,

Sorry I missed the details!! Absolutely amazing images indeed

Seeing down 6 metal levels is probably beyond 3 microns in depth, but not sure what process this is in, nor the passivation used. Might be polyamide or BCB, judging from the color, but below this is usually SiN, or SiO2+SiN.

Please tell us how you did this incredible work Shocked

Best,

Mike


Thanks for the comments. Nothing ground breaking or amazing here Mike. Just the typical work flow of taking pics with a microscope at specific DOF increments, pre-processing them in PS and having Zerene do all the hard stuff.

I'm more interested in the technical stuff but haven't the education or high enough mathematics background to pursue my interest. I try but it's like trying to explain to someone in a text message how to rebuild a automatic transmission with out pictures.

-JW:
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mawyatt



Joined: 22 Aug 2013
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PostPosted: Wed Feb 28, 2018 5:41 pm    Post subject: Reply with quote

rjlittlefield wrote:
mawyatt wrote:
Seeing down 6 metal levels is probably beyond 3 microns in depth

As I understand the shooting process, 3 microns depth sounds almost certainly correct. JW monitors the position of his stage using a Mitutoyo dial indicator, one micron per tick mark. Those "1/3 um steps" listed in the image description were eyeballed between tick marks, so individual steps might be off a little, but the total ~3 microns, probably not.

The width number is less certain because that is calculated, not measured.

--Rik


Rik,

Here's what I found from a Stanford 2003 EE 311 class lecture.

https://web.stanford.edu/class/ee311/NOTES/Interconnect_Al.pdf



Of course you have the lens effect taking place at the chip surface with the index of refraction for the insulators hovering around 1.5.

Best,

Mike
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razashaikh



Joined: 14 Nov 2017
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Location: India

PostPosted: Wed Feb 28, 2018 9:27 pm    Post subject: Reply with quote

A great thread with amazing stereo images.

Thanks for the information rjlittlefield.

Regards,
Raza
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rjlittlefield
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Joined: 01 Aug 2006
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PostPosted: Wed Feb 28, 2018 10:15 pm    Post subject: Reply with quote

mawyatt wrote:
Of course you have the lens effect taking place at the chip surface with the index of refraction for the insulators hovering around 1.5.

I was wondering if the lower levels were somehow exposed, versus being seen through transparent stuff.

If I recall correctly, apparent depth goes as 1/RI, so 3 microns apparent at refractive index 1.5 would be actual depth 4.5 microns.

Your diagram shows about 10 microns.

That discrepancy strikes me as large enough to be interesting, but given the direct measurement method, not large enough to indicate an error. That judgement could change with more info, of course.

While I have you here, I have another question. In JW's images, the top layer of elements, oriented vertically in these images, seems to bump up-and-over the elements that are oriented horizontally. In the diagram that you've provided, I notice that the "metal 5" layer seems actually to be two sets of wires, with one crossing up and over the other. Is that perception correct?

--Rik
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Smokedaddy



Joined: 07 Oct 2006
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PostPosted: Thu Mar 01, 2018 7:10 am    Post subject: Reply with quote

Thanks Mike. I dug this up this morning.





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